| 标题 |
Evaluation of polishing induced subsurface damage in InAs substrates by an acid solution etching method |
| 网址 | |
| DOI | |
| 其它 |
期刊:Materials Science in Semiconductor Processing 作者:Yinhong Feng; Guiying Shen; Youwen Zhao; Jingming Liu; Jun Yang; et al 出版日期:2023-08-15 |
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(2025-6-4)