| 标题 |
Investigation of thermal stress effects during annealing of hafnia-made thin film using molecular dynamics simulations |
| 网址 | |
| DOI | |
| 其它 |
期刊:Microelectronic Engineering 作者:Raj Kiran; Yongwoo Kwon 出版日期:2024-02-21 |
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(2025-6-4)