| 标题 |
Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier |
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| DOI | |
| 其它 |
期刊:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 作者:Lukas Hoffmann; Detlef Theirich; Daniel Schlamm; Tim Hasselmann; Sven Pack; et al 出版日期:2017-12-08 |
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(2025-6-4)