| 标题 |
Hybrid integrated Si nanosheet GAA-FET and stacked SiGe/Si FinFET using selective channel release strategy |
| 网址 | |
| DOI | |
| 其它 |
期刊:Microelectronic Engineering 作者:Fei Zhao; Xiaofeng Jia; Huaizhi Luo; Jiayi Zhang; Xiaotong Mao; et al 出版日期:2023-03-25 |
| 求助人 | |
| 下载 | 求助已完成,仅限求助人下载。 |
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(2025-6-4)