| 标题 |
Tunable SiO2 to SiOxCyH films by ozone assisted chemical vapor deposition from tetraethylorthosilicate and hexamethyldisilazane mixtures |
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| DOI | |
| 其它 |
期刊:Surface & Coatings Technology 作者:Konstantina Christina Topka; Babacar Diallo; Diane Samélor; R. Laloo; Daniel Sadowski; et al 出版日期:2020-12-17 |
| 求助人 | |
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(2025-6-4)