| 标题 |
Surface Reaction of Ru Thin Films Etched in CF4/O2 Gas Chemistry |
| 网址 | |
| DOI |
10.4313/jkem.2002.15.12.1016
doi
|
| 其它 |
期刊:Journal of Korean Institute of Electrical and Electronic Materials Engineers 作者:Kyu Tae Lim; Dong Pyo Kim; Kyoung Tae Kim; Chang Il Kim; Jang Hyun Choi; et al 出版日期:2010-09-10 |
| 求助人 | |
| 下载 | 求助已完成,仅限求助人下载。 |
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(2025-6-4)