| 标题 |
 The Role of the Methyl and Hydroxyl Groups of Low-k Dielectric Films on the Nucleation of Ruthenium by ALD |
| 网址 | |
| DOI | |
| 其它 |
期刊：Electrochemical and Solid-State Letters 作者：Jaeyeong Heo; Seok-Jun Won; Dail Eom; Sang Young Lee; Young Bae Ahn; et al 出版日期：2008-01-01 |
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| 下载 | 求助已完成，仅限求助人下载。 |
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