| 标题 |
Study of dry etched N-polar (Al)GaN surfaces obtained by inductively coupled plasma etching |
| 网址 | |
| DOI | |
| 其它 |
期刊:Frontiers in Physics 作者:Xiaoming Ge; Xuebing Yin; Qiaoyu Zeng; Qi Feng; Xiaohui Wang; et al 出版日期:2022-10-26 |
| 求助人 | |
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(2025-6-4)