| 标题 |
Acid generation efficiency prediction by bond cleavage calculation of EUV photoacid generators |
| 网址 | |
| DOI |
10.1117/12.3010977
doi
|
| 其它 |
期刊:Advances in Patterning Materials and Processes XLI 作者:Jayoung Koo; YunJi Kim; You Rim Shin; HyunHo Yoon; Philjae Kang; et al 出版日期:2024-04-09 |
| 求助人 | |
| 下载 | 求助已完成,仅限求助人下载。 |
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(2025-6-4)