| 标题 |
An electrostatic micro-electromechanical systems micromirror with low-torsional stress supported by three-asymptote beam |
| 网址 | |
| DOI | |
| 其它 |
期刊:Chip 作者:Xiao-Yong Fang; Ang Li; Er-Qi Tu; Bo Peng; Zhi-Ran Yi; Wen-Ming Zhang 出版日期:2025 |
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(2025-6-4)