| 标题 |
Mechanism of PVA Brush Loading with Ceria Particles during Post-CMP Cleaning Process |
| 网址 | |
| DOI | |
| 其它 |
期刊:Solid State Phenomena 作者:Samrina Sahir; Hwi Won Cho; Nagendra Prasad Yerriboina; Tae Gon Kim; Satomi Hamada; et al 出版日期:2021-02-09 |
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(2025-6-4)