| 标题 |
Novel approach for KrF chemically amplified resist optimization assisted by deep learning |
| 网址 | |
| DOI | |
| 其它 |
期刊:Journal of vacuum science and technology 作者:Chen Tang; Toshiaki Tanaka; Atsushi Sekiguchi; Yoshihiko Hirai; Masaaki Yasuda 出版日期:2024-12-01 |
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(2025-6-4)