材料科学
制作
光刻
晶体管
纳米技术
信号(编程语言)
电子线路
光电子学
遮罩(插图)
可扩展性
集成电路
聚合物
可伸缩电子设备
逻辑门
半导体器件制造
有机场效应晶体管
平版印刷术
薄膜晶体管
纳米电子学
电子工程
过程(计算)
基质(水族馆)
计算机科学
作者
Yujia Yuan,Chuanzhen Zhao,Margherita Ronchini,Yuya Nishio,Donglai Zhong,Can Wu,Hyukmin Kweon,Zehao Sun,Rachael K. Mow,Yuran Shi,Lukas Michalek,Haotian Wu,Qianhe Liu,Weichen Wang,Yating Yao,Zelong Yin,Junyi Zhao,Zihan He,Ke Chen,Ruiheng Wu
标识
DOI:10.48550/arxiv.2601.10975
摘要
Soft, stretchable organic field-effect transistors (OFETs) can provide powerful on-skin signal conditioning, but current fabrication methods are often material-specific: each new polymer semiconductor (PSC) requires a tailored process. The challenge is even greater for complementary OFET circuits, where two PSCs must be patterned sequentially, which often leads to device degradation. Here, we introduce a universal, monolithic photolithography process that enables high-yield, high-resolution stretchable complementary OFETs and circuits. This approach is enabled by a process-design framework that includes (i) a direct, photopatternable, solvent-resistant, crosslinked dielectric/semiconductor interface, (ii) broadly applicable crosslinked PSC blends that preserve high mobility, and (iii) a patterning strategy that provides simultaneous etch masking and encapsulation. Using this platform, we achieve record integration density for stretchable OTFTs (55,000 cm^-2), channel lengths down to 2 um, and low-voltage operation at 5 V. We demonstrate photopatterning across multiple PSC types and realize complementary circuits, including 3 kHz stretchable ring oscillators, the first to exceed 1 kHz and representing more than a 60-fold increase in stage switching speed over the state of the art. Finally, we demonstrate the first stretchable complementary OTFT neuron circuit, where the output frequency is modulated by the input current to mimic neuronal signal processing. This scalable approach can be readily extended to diverse high-performance stretchable materials, accelerating the development and manufacturing of skin-like electronics.