Cascaded multimode interference-based microresonators for multiple Fano resonance engineering

We propose a method for realization of multiple Fano resonances and double electromagnetically induced transparency. The proposed device is based on only three cascaded identical 3 × 3 multimode interference microresonators on a single silicon on insulator chip. We derive the analytical expressions for the normalized transmission characteristics. The structure offers a high-modulation depth of nearly 100%, an extremely large fabrication tolerance of ±100 nm, and a compact size of 700 × 1000 μm2.