材料科学
准分子激光器
脉冲激光沉积
薄膜
激光烧蚀
蒸发
无定形固体
沉积(地质)
激光器
微晶
烧蚀
爆炸物
光电子学
冶金
光学
纳米技术
化学
结晶学
物理
古生物学
工程类
有机化学
航空航天工程
沉积物
生物
热力学
作者
Hans‐Ulrich Krebs,Olaf Bremert
摘要
The pulsed KrF excimer laser ablation was applied for the preparation of thin metallic alloys. Above an ablation threshold of about 5 J/cm2, an explosive evaporation of the target material occurs leading to high deposition rates of up to 3 nm/s and a stoichiometry transfer between the target and the deposited film. The surfaces of the grown amorphous and polycrystalline films are smooth except for a small number of droplets. The pulsed laser ablation was found to be an attractive alternative to other film deposition techniques, not only for high-temperature superconductors, semiconductors, and insulators, but also for metallic alloys.
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