计量学
干涉测量
计算机科学
平版印刷术
过程(计算)
空白
投影(关系代数)
算法
过程分析技术
立体光刻
过程控制
光学
在制品
机械工程
工程类
物理
操作系统
运营管理
作者
Xiayun Zhao,David W. Rosen
标识
DOI:10.1088/0957-0233/28/1/015001
摘要
As additive manufacturing is poised for growth and innovations, it faces barriers of lack of in-process metrology and control to advance into wider industry applications. The exposure controlled projection lithography (ECPL) is a layerless mask-projection stereolithographic additive manufacturing process, in which parts are fabricated from photopolymers on a stationary transparent substrate. To improve the process accuracy with closed-loop control for ECPL, this paper develops an interferometric curing monitoring and measuring (ICM&M) method which addresses the sensor modeling and algorithms issues. A physical sensor model for ICM&M is derived based on interference optics utilizing the concept of instantaneous frequency. The associated calibration procedure is outlined for ICM&M measurement accuracy. To solve the sensor model, particularly in real time, an online evolutionary parameter estimation algorithm is developed adopting moving horizon exponentially weighted Fourier curve fitting and numerical integration. As a preliminary validation, simulated real-time measurement by offline analysis of a video of interferograms acquired in the ECPL process is presented. The agreement between the cured height estimated by ICM&M and that measured by microscope indicates that the measurement principle is promising as real-time metrology for global measurement and control of the ECPL process.
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