Application of conductive graphene films for high-performance hemispherical resonator gyroscopes

Hemispherical resonator gyroscope is a type of solid-state gyroscope, in which the fused silica hemispherical resonator with a high-quality factor (Q factor) is the key for the fabrication of high-performance devices. However, the metal film coated on the silica as the electrode for trigging the resonance often leads to the largely deteriorated Q factor. In this work, high-quality graphene films with controllable number of layers are uniformly coated on silica utilizing C2H4 as precursor in chemical vapor deposition. Replacing the metal film as the electrode, the hemispherical resonator coated with graphene demonstrates a Q factor of 3.38 × 106, with a high retention of 77.17%. At an optimized preparation temperature of 1130 °C, the graphene film shows a good adhesion with the silica hemisphere, providing an excellent candidate as the electrode for high-performance hemispherical resonators.