Fabrication of low loss waveguide using fundamental light of Yb-based femtosecond laser (Conference Presentation)

Laser direct writing of optical devices and circuits is attracted attention because of its ability of three-dimensional fabrication without any mask[1]. Recently, Yb-fiber or solid-state laser has been commonly used for fabrication in addition to traditional Ti:S laser. However, it is reported that waveguide cannot be fabricated in fused silica by using the fundamental light from Yb-based femtosecond laser[2]. Some groups reported on waveguide fabrication by using second-harmonic beam of such lasers[3], but wavelength conversion using nonlinear process has drawbacks such as destabilization of laser power and beam deformation by walk off. In this study, we investigated fabrication of low-loss waveguide in fused silica by using the fundamental beam (1030nm) from an Yb solid-state femtosecond laser with a pulse duration of 250 fs. The NA of focusing objective lens was 0.42. The fabricated waveguide was made to have a circular cross-section by shaping laser beam with a slit[4]. We fixed repetition rate to 150 kHz, and identified appropriate scan speed and pulse energy for fabrication of low loss waveguide. Waveguide fabricated with appropriate condition had a propagation loss of 0.2 dB/cm, and this is the first report on optical waveguides in a fused silica fabricated by femto-second laser pulses at a wavelength of 1030nm. [1]K. M. Davis, et. al., Opt. Lett 21, 1729(1996) [2]J. Canning, et. al., Opt. Mater. Express 1, 998(2011) [3]L. Shah, et. al., Opt. Express 13, 1999(2005) [4]M. Ams, et. al., Opt. Express 13, 5676(2005)