Ultrafast-response/recovery capacitive humidity sensor based on arc-shaped hollow structure with nanocone arrays for human physiological signals monitoring

Abstract Flexible humidity sensors have attracted substantial attention due to the promising application in medical health monitoring. Up to now, the realization of such devices with ultrafast response/recovery and controllable morphology via a facile and cost-effective approach still remains a severe challenge. Herein, a high-performance flexible capacitive humidity sensor by creating the arc-shaped hollow structure with the poly(vinylidenefluoride-co-trifluoroethylene) [P(VDF-TrFE)] nanocone arrays is developed. Particularly, a facile method based on combining the hot-pressing method and the anodized aluminum oxide template transfer method is proposed to realize the large-scale preparation of the nanostructure arrays with controllable morphology. Benefiting from the open arc-shaped hollow structure and the large-area P(VDF-TrFE) nanocone arrays, the proposed humidity sensor shows several conspicuous features, such as ultrafast response/recovery time (3.693/3.430 s), long-term stability (25 days), excellent bending stability (10,000 cycles), unaffected capacitance response to humidity in a certain temperature range (20−50℃) and high selectivity toward water vapor. The above salient superiorities enable the proposed humidity sensor to be successfully utilized in extraction of a variety of physiological signals including breathing detection, skin noncontact sensing, and real-time monitoring of diaper wetting process and skin humidity, which reveals great potential value in prevention and diagnosis of many diseases.