Description and Interpretation of Systematic Deviations from Epitaxial Laws of Overgrowth

The effect of epitaxial misorientation on substrates having vicinal surfaces is studied using two simple geometrical models.The misorientations in two epitaxial systems, single layers and superlattices, can be partially explained by means of these models.Furthermore, the fundamentals of a new description tool for orientation relationships of epitaxial systems are outlined briefly, and two examples of application are given.