Application of TMAH Solution in MEMS

Through experiments on silicon cup manufacturing, the characteristics of TMAH solution are discussed, including the dependence of etching rate of (100) oriented silicon crystal plane on concentration and temperature, and the surface conditions under different etching environments The optimal process conditions for manufacturing silicon cup are also obtained The experimental results demonstrate that the output characteristics of polysilicon pressure sensors with silicon cup structure are in agreement with theoretical analysis It has been shown that TMAH is a prospective anisotropic etchant in micromachining