Fabrication of the SiC Gate-All-Around JFET

Although silicon carbide integrated circuits (SiC ICs) have remarkable heat and radiation tolerances, the lack of performance in transistors is a significant hurdle to their widespread commercialization. A higher transconductance coefficient is one of the key factors for improving transistors’ performance. In this study, we have fabricated n-type lateral SiC JFETs with gate-all-around (GAA) structures to maximize their transconductance coefficients. The GAA structure was formed by high-energy Al ion implantation for the bottom layer and tilted one just after SiC gate etching for the side layers on the n-epitaxial layer of 4H-SiC. We obtained the transconductance coefficients 4.89, 3.90, and $3.19~\mu \text{A}/\text{V}^{{2}}$ per channel for gate lengths 2, 3, and $4~\mu \text{m}$ , respectively. The maximum terminal gain is 683 at $25~^{\circ} \text{C}$ and about 160 at $250~^{\circ} \text{C}$ – $300~^{\circ} \text{C}$ , suggesting that SiC ICs based on GAA JFETs could function well even at high temperatures. The JFETs show little body bias effect, which is also preferable for IC applications.