Simulation and investigation of high-frequency Si-based piezoelectric micromachined ultrasonic transducer (PMUT) performances

The application of ultrasonic transducers is relying on the frequency which the transducers resonated. In the imaging application, an ultrasonic transducer should possess resonant frequency that higher than 2 MHz while in ultrasound testing, a range of 2 to 10 MHz is seeming to be adequate. This report is investigating the performance of high frequency Si-based PMUT with different piezoelectric material used in the structure. The piezoelectric materials used are Aluminium Nitride (AlN), Lead Zirconate Titanate (PZT), and Zinc Oxide (ZnO). Using the same dimensions, the obtained resonant frequencies of PMUT are 4.0370 MHz, 2.8224 MHz, and 3.4358 MHz for AlN, PZT and ZnO respectively.