PMUT公司
材料科学
压电
超声波传感器
锆钛酸铅
传感器
声学
电容式微机械超声换能器
氮化物
光电子学
电介质
铁电性
复合材料
物理
图层(电子)
作者
Hasnizah Aris,N. A. A. Kaharuddin,Zaliman Sauli,Azlan Abdul Aziz,W. M. W. Norhaimi
出处
期刊:Nucleation and Atmospheric Aerosols
日期:2024-01-01
卷期号:3050: 030046-030046
摘要
The application of ultrasonic transducers is relying on the frequency which the transducers resonated. In the imaging application, an ultrasonic transducer should possess resonant frequency that higher than 2 MHz while in ultrasound testing, a range of 2 to 10 MHz is seeming to be adequate. This report is investigating the performance of high frequency Si-based PMUT with different piezoelectric material used in the structure. The piezoelectric materials used are Aluminium Nitride (AlN), Lead Zirconate Titanate (PZT), and Zinc Oxide (ZnO). Using the same dimensions, the obtained resonant frequencies of PMUT are 4.0370 MHz, 2.8224 MHz, and 3.4358 MHz for AlN, PZT and ZnO respectively.
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