Electronic-Nose: An Array of 16 MOS-Gas Sensors Integrated With Temperature and Moisture Sensing Capabilities

This paper reports a new design of electronic-nose based on the Micro Electromechanical System (MEMS). An array of multiple metal-oxide semiconductor (MOS) gas sensors integrated with temperature and moisture sensing channels are fabricated on a single chip. Benefiting from the heat and humidity sensing capabilities, this electronic-nose exhibits an enhanced gas sensing property with improved accuracy. As low as 0.2 ppm of H 2 S can be successfully identified, and the resistance of the gas sensor corresponding to the long-term stability drifts only about 3% after 100 days. It opens up new opportunities for fabricating bionic olfactory microsystems with multiple sensing channels and shows its potential for precisely detecting complex gases in practical applications.