材料科学
时域有限差分法
薄脆饼
等离子体子
近场扫描光学显微镜
电子束光刻
电场
光学
蚀刻(微加工)
平版印刷术
硅
光电子学
表面等离子体子
近场和远场
晶片切割
电磁场
纳米技术
光学显微镜
扫描电子显微镜
抵抗
图层(电子)
物理
复合材料
量子力学
作者
Yong Wu,Dong Wei,Zhaowei Xin,Xinyu Zhang,Changsheng Xie,Dapeng Li,Haiwei Wang
摘要
In this paper, a new kind of symmetrical aluminum (Al) nanotips structure based on localized rather traditional propagating surface plasmon polarizations (SPPs) focusing are designed and fabricated successfully. The simulation results about near-field distribution of electric field and reflectance calculations using finite-difference time-domain (FDTD) simulation theory are exhibited and then the device is fabricated mainly by coating Al films with the thickness of 100 nm on n-type doping silicon (Si), cutting into scale of 15mm×15mm by wafer dicing, electron beam lithography (EBL) exposure and ICP etching. The near-field focusing properties about small spot breaking the diffracting limitation with one order enhancement in the near-tip area of this structure are demonstrated experimentally using scanning nearfield optical microscopy (SNOM), and the comparisons to simulation results are analyzed, so as to reveal a potential application in capturing near-field focusing images quickly by applying exterior voltage signals based on our structure with nanotips.
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