Low energy electron irradiation of carbon thin films

Low energy electrons irradiation represent an alternative method for the chemical and thermal treatments used in the elimination of sp 3 hybridization of carbon thin films and restoring the sp 2 structures. The procedure significantly reduces the added chemical groups mainly hydroxyl ones presented in alcohols, on the surfaces of the carbon deposited thin films. Irradiation induces a graphitization process of deposited carbon thin films revealed by the x-ray diffraction, x-ray photoelectrons spectroscopy, Raman spectroscopy and sheet resistance measurements which demonstrate a gradual elimination of the add-on chemical groups together with the increasing of electrical conductivity in these carbon films.