Multi-parameter terahertz metamaterial sensors based on single-layer quarter ring patterns

A terahertz metamaterial sensor based on a single-layer quarter ring pattern is proposed to realize the simultaneous measurement of temperature, refractive index, and other parameters through a metasurface consisting of a patterned quarter ring gold layer and a silicon substrate. Field finite element numerical simulations were performed to analyse the transmission and reflection spectra. A two-parameter sensor combined with electric field distribution was realized using multiple peaks, thus revealing the physical mechanisms of the interaction in metamaterial structures. In addition, the effect of each geometrical parameter on the sensor performance is also simultaneously analysed to verify the optimal selection of structural parameters. On this basis, the sensors are theoretically analysed at different incidence and polarization angles, and the results show that the transmittance is not sensitive to the polarization angle. The simulation results show that the transmittance at the resonant frequencies of 0.48 THz, 0.64 THz, 0.79 THz and 1.04 THz are 93.7 %, 79.1 %, 38.4 % and 50.8 %, respectively, and the refractive index sensitivities at the resonant frequencies are 6.84 GHz/RIU, 7.42 GHz/RIU, 8.22 GHz/RIU and 32.11 GHz/RIU, and quality factor Q of 6.76, 9.63, 15.51 and 26.28, respectively. The devices proposed in this study are simple in structure, easy to fabricate, easy to miniaturize and can be integrated for sensitivity, multi-parameter sensors. They can be functionally designed for chemical and biological sensing and other important applications.