Crystallization of α phase polyoctylfluorene(PFO) film was characterized by grazing incident X-ray diffraction(GIXRD). Effect of instrument slits was also studied. Results showed that contrasting with normal X-ray diffraction, diffraction peaks could be clearly observed when background signal was eliminated and their intensities were enhanced by GIXRD. Using larger slits led to stronger diffraction intensity and more broad diffraction peak.B2-b2 equation was considered to be suitable for the calculation of real FWHM used to calculate crystallites size.