X-ray evidence for a terraced GaAs/AlAs superlattice

We report an x-ray diffraction study of a GaAs/AlAs superlattice, showing satellite reflections which lie on a line making a constant, nonzero angle with the [00L] reciprocal lattice rod containing the fundamental reflections. The results indicate a terraced superlattice structure in which the chemical modulation of the GaAs/AlAs layers is tilted with respect to the (001) lattice planes. This tilt imposes a reduced lateral domain size on the superlattice, which can be deduced from the angular widths of the satellite reflections.