原子层沉积
材料科学
纳米技术
电池(电)
电极
离子
沉积(地质)
图层(电子)
锂离子电池的纳米结构
航程(航空)
光电子学
工程物理
电化学
化学
工程类
物理
复合材料
生物
量子力学
物理化学
古生物学
功率(物理)
有机化学
沉积物
作者
Harm C. M. Knoops,Merijn E. Donders,M. C. M. van de Sanden,Peter H. L. Notten,W. M. M. Kessels
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2011-11-21
卷期号:30 (1)
被引量:126
摘要
Nanostructuring is targeted as a solution to achieve the improvements required for implementing Li-ion batteries in a wide range of applications. These applications range in size from electrical vehicles down to microsystems. Atomic layer deposition (ALD) could be an enabling technology for nanostructured Li-ion batteries as it is capable of depositing ultrathin films (1–100 nm) in complex structures with precise growth control. The potential of ALD is reviewed for three battery concepts that can be distinguished, i.e., particle-based electrodes, 3D-structured electrodes, and 3D all-solid-state microbatteries. It is discussed that a large range of materials can be deposited by ALD and recent demonstrations of battery improvements by ALD are used to exemplify its large potential.
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