放气
材料科学
原子层沉积
残余气体分析仪
聚合物
扫描电子显微镜
聚碳酸酯
ABS树脂
涂层
复合材料
图层(电子)
化学工程
化学
质谱法
有机化学
色谱法
工程类
作者
Nupur Bihari,Ismo T. S. Heikkinen,Giovanni Marin,Craig Ekstrum,Pierce J. Mayville,Shane Oberloier,Hele Savin,Maarit Karppinen,Joshua M. Pearce
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2020-08-14
卷期号:38 (5)
被引量:14
摘要
3D printing offers enormous potential for fabricating custom equipment for space and vacuum systems, but in order to do this at low costs, polymers are necessary. Historically, polymers have not been suitable for these applications because of outgassing, but if coated with a conformal, inorganic film introduced with atomic layer deposition (ALD), then outgassing can be reduced. Previous work on coating ALD layers showed promise with heavily outgassing carbon black containing 3D printed polymers. In this study, ALD aluminum oxide and a commercially available vacuum sealant resin were used to coat clear, acrylonitrile butadiene styrene, polycarbonate, and polypropylene. Characterization of the films included spectroscopic ellipsometry for thickness, microstructure analysis with scanning electron microscopy, chemical analysis with energy-dispersive x-ray spectroscopy, and residual gas analysis to study relative change in outgassing. ALD-coated samples registered lower pressures than the resin-coated ones. The results showed that the ALD coatings could effectively inoculate unpigmented 3D printed plastics, which could be used in contamination-sensitive environments such as semiconductor processing systems and space environments.
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