材料科学
陶瓷
电极
溅射沉积
光电子学
欧姆接触
焊接
沉积(地质)
溅射
腔磁控管
高功率脉冲磁控溅射
复合材料
冶金
薄膜
纳米技术
图层(电子)
沉积物
生物
物理化学
古生物学
化学
作者
Jiabao Cen,Demiao Wang
出处
期刊:Physics Procedia
[Elsevier]
日期:2012-01-01
卷期号:32: 482-486
被引量:5
标识
DOI:10.1016/j.phpro.2012.03.589
摘要
DC magnetron sputtering was applied in the deposition of the electrodes of the BaTiO3-based PTC ceramics. Multi-layered films of Ti/Ni-Cu/Ag and Al/Ni-Cu/Ag were prepared as the electrodes of PTCR ceramics. Experimental results indicated that there could form good ohmic contacts between BaTiO3-based PTC ceramics and the electrode materials. Also, the electrodes had good adhesion to the substrates and high-temperature welding characteristics. The proposed method has such advantages as economic consumption of production cost and controllable process, thus is suitable for large-scale industrial production.
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