等离子体
微电子
容性耦合等离子体
电子
材料科学
等离子体处理
物理
薄脆饼
原子物理学
光电子学
核物理学
感应耦合等离子体
作者
Sang-Heon Song,Mark J. Kushner
出处
期刊:IEEE Transactions on Plasma Science
[Institute of Electrical and Electronics Engineers]
日期:2011-11-01
卷期号:39 (11): 2542-2543
被引量:1
标识
DOI:10.1109/tps.2011.2132743
摘要
Pulsed capacitively coupled plasmas (CCPs) are attractive for controlling electron energy distributions f (ε) and plasma properties for microelectronic fabrication. A conceptual design of a pulsed CCP is discussed which provides additional control over the magnitude and composition of the reactive fluxes to the wafer. We present computed images of time-resolved f (ε) and electron density during a pulse period.
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