One dimensional simulation of microscale DBD plasma

An one dimensional multi-fluid plasma model is setup for micro-scale DBD plasma device. The micro-scale DBD plasma device has an inverted pyramidal cavity with metal-dielectric-metal structure. The features of Ar micro-plasma generated in micro-DBD device are numerical simulated through COMSOL software. The time evolutions of plasma parameters such as electrical potential, electron density, electron temperature are discussed in the simulation results.