Signal-to-noise ratio evaluation for the nanometer-scale patterned defect inspection using dark-field microscopy with tailored polarization illumination

Advances in the semiconductor industry have led the wafer inspection technology to the limit of nanometer-scale defect detection, which is far beyond the diffraction limit. In this regime, the signal-to-noise ratio (SNR) is the figure-of-merit to determine whether the optical system can detect a single nanometer-scale defect. In this paper, we investigated the SNR properties of various line defects using the dark-field inspection with tailored polarized illumination by simulation and experiment. Conventional crossed Nicols configuration with linear polarized illumination and crossed analyzer can minimize background scattering noise and maximize line defect signal only for a specific kind of line defect such as gap or bridge due to strong polarization dependence on a line and space (L/S) pattern. The nulling elliptically polarized illumination is optimized to suppress background scattering noise moderately and maintain defect signal intensity at the same time. We confirmed SNR improvement for both 10 nm open and bridge defects on 40 nm line and space silicon pattern with 40 nm depth. There was a good agreement between our simulation results and experimental results. We experimentally confirmed SNR ~ 4 for both line gap and bridge defect detection on 40 nm L/S patterned wafer with the fixed nulling illumination.