Review of high-precision femtosecond laser materials processing for fabricating microstructures: Effects of laser parameters on processing quality, ablation efficiency, and microhole shape

Femtosecond lasers are promising tools for achieving high-precision processing of thin materials without causing any thermal surface damage and bulk distortion. However, thermal damage can occur even with ultrashort laser pulses. This is because of high electron penetration depth and heat accumulation at high fluence and high repetition rate. Nanoparticle redeposition can be dramatically altered with variation in repetition rate. The symmetry of microholes and ablation efficiency vary with laser polarization. The laser wavelength affects the ablation efficiency and surface roughness. Therefore, understanding these laser–matter interactions that depend on the laser parameters is essential for high-precision laser processing. This article reviews laser–matter interactions in the 64FeNi alloy, as well as analytical models for designing the desired hole size and taper angles. This can help establish strategies for creating various high-precision microstructures using femtosecond lasers.