Scaling the nanoimprint lithography process of inorganic-based materials for photonic metasurfaces

Sol-gel coatings and nano-imprint lithography are employed to directly frame 3D nano-structures composed of hard ceramics (e.g. SiO2, TiO2) over large surfaces. Photonic metasurfaces can be produced with high throughput at low cost for applications in structural colour, anti-reflection coatings for high power lasers, AR/VR, and light emission.