Electrochromic(EC) materials exhibit variable and reversible optical properties under the action of voltage pulses. Tungsten oxide and nickel oxide are the most popular electrochromic materials. In this work, EC tungsten oxide and nickel oxide films were deposited on ITO coated glass substrates with electron beam evaporation. The effect of annealing technique of the structure and EC properties was discussed. Electrochromic properties of EC films were tested by electrochemical method. Semisolid-state smart window was encapsulated and it showed good electrochromic performance.