On-Chip Terahertz Sensor Based on Low-Loss Coplanar Strip Lines for the Analysis of Microscale Two-dimensional Materials

In this study, a low-loss on-chip Terahertz (THz) sensor for future analysis of microscale two-dimensional (2D) materials has been investigated. The sensor is fabricated with the coplanar strip (CPS) lines patterned on a low permittivity polymer substrate that offers a wide usable THz bandwidth as well as controlled and efficient access to small samples combined with mechanical robustness. The applied THz signal is highly confined within the CPS transmission lines and recorded via time-resolved photo-conductive (PC) sampling. The architecture includes a separable sample carrier film integrated with the sensor, designed to probe very small 2D material sections with high sensitivity to electronic material properties.