Comparative analysis of different micro-pressure sensors using comsol multiphysics

Amongst MEMS technology, pressure measuring technology is one of the most important parameter, which is measure of force per unit area. In this work a comparative analysis of different pressure sensor mechanisms is carried out. Capacitive pressure sensors work on the principle of electrostatic transduction mechanism, piezoresistive pressure sensor employs a change in resistance values of piezoresistive elements placed on the surface of the diaphragm. The piezoelectric pressure sensor works based on piezoelectric effect, where the sensing element is stressed due to the applied pressure, positive electric charge is generated which in turn results to induced voltage. The simulation and modeling of proposed pressure sensors is done using COMSOL Multiphysics. Based on simulation results, capacitive pressure sensor exhibits non-linear response. Piezoresistive pressure sensor provides high linearity and better sensitivity. Piezoelectric pressure sensors achieve high sensitivity but are applicable to only dynamic pressure conditions.