Smart down-sampling using SONR

In this paper, we are presenting a smart and efficient methodology to select the most representative patterns on the wafer. Calibre-SONR is doing Smart down-sampling to patterns on the wafer based on their features and choose the most representative ones to be used in different applications. In addition, it gives the user the flexibility to choose the range of needed representative patterns to tune their models on. A comparison between SONR down-sampling and typical offthe- shelf down-sampling and clustering techniques is done. SONR gives better coverage to the unique patterns than other techniques and able to handle larger data sets.