P‐225: Late‐News Poster: Improving Specific Contact Resistivity of a‐IGZO Thin‐Film‐Transistors via Multi‐stack Interlayer

We report the effects of sputter‐based multi‐stack interlayer on the electrical contact properties of a‐IGZO TFTs. The a‐IGZO TFTs with a multi‐stack interlayer of TiN and IGTO showed remarkable outcomes, including the lowest specific contact resistivity (ρC) and the highest field‐effect mobility (μFET). This research suggests a highly effective approach to reduce the contact resistivity of oxide semiconductors by nearly two orders magnitude.