Thickness-Dependent Nanoscale Elastic Stiffening of Chemical Vapor Deposited Atomically Thin 2H-MoS2 Films

Understanding the nanoscale elastic-size-effects of atomically thin transition-metal dichalcogenides (TMDs) as a function of thickness underpins the avenue of flexible 2D electronics. In this work, we employed the atomic force acoustic microscopy (AFAM) technique to investigate the thickness-dependent elastic properties of CVD grown 2H-MoS₂ films. The monolayer MoS₂ exhibited a Young's modulus of 273 ± 27 GPa. Our systematic analysis from bulk to monolayer suggests that the 2H-MoS₂ phase exhibits nanoscale elastic-stiffening behavior with decreasing number of layers (thickness). The Young's modulus increased by a factor of ∼2.7 for monolayer MoS₂ when compared with the bulk. First-principle DFT calculations affirm the nanoscale elastic-stiffening behavior of MoS₂ with decreasing number of layers. Our findings suggest that the observed elastic stiffening is due to the interlayer sliding, which may be facilitated by defects in MoS₂ layers. The observed elastic stiffening may be of potential importance for understanding TMD based nanomechanical devices.