We present simulation results on the influence of grating shapes on diffracted beam profiles for right-angle diffraction. The first-order two-dimensional coupled-mode equations are solved numerically by using the finite-difference method for As(2)S(3) waveguide surface-relief gratings on titanium-indiffused planar waveguides. The simulation results show that square or rectangular gratings result in a distorted profile for the diffracted beam and that truncated grating shapes significantly improve the output beam quality.