A piezoelectric mechanically coupled Lamé mode resonator with ultra-high Q

A piezoelectrically actuated high quality factor (Q) mechanically coupled Lamé mode resonator based on a thin-film piezoelectric-on-silicon (TPoS) platform is demonstrated. The reported coupled resonator consists of two identical square plates of single-crystal silicon (SCS) coupled with a SCS beam having thin-film piezoelectric stacked layers on top. The coupled resonator is piezoelectrically driven into resonance, and the two square plates are excited into vibrations in a coupled Lamé mode through mechanical coupling. An impressive passive Q-enhancement is obtained by such a scheme based on mechanical coupling of two SCS square plates with a piezoelectrically transduced beam. A fabricated mechanically coupled Lamé mode resonator exhibits an ultra-high Q of 309 894 while still maintaining a moderate impedance (Rm) of 6652 Ω at its resonant frequency of 18.2838 MHz, corresponding to the record highest f-Q product of 5.67 × 1012 for TPoS resonators. The reported high Q microelectromechanical system (MEMS) resonator overcomes the inherent low-Q nature of piezoelectric MEMS resonators, indicating an application for providing a high-performance timing solution in a MEMS timing field.