Considerations on the XPS Analysis of 2H‐TaS 2 (0001)

ABSTRACT A 2H‐TaS 2 (0001) single crystal was studied with XPS. The quantification and fitting procedures for this material are discussed in detail. It is shown that conventional approaches for data deconvolution fail, and an in‐depth analysis utilising theoretical sensitivity factors and taking into account the shake‐up and loss structures is needed to produce accurate results. Additionally, the inherent asymmetry of the Ta and S peaks is highlighted, and appropriate line shapes are determined.