材料科学
物理气相沉积
锐钛矿
溅射
薄膜
溅射沉积
金红石
复合材料
冶金
氩
造型(装饰)
涂层
化学工程
纳米技术
化学
生物化学
光催化
工程类
催化作用
有机化学
作者
Sugeng Supriadi,Annisa Ovilia,Nurul Ilmaniar,Bambang Suharno
出处
期刊:Key Engineering Materials
日期:2020-06-03
卷期号:846: 169-174
被引量:1
标识
DOI:10.4028/www.scientific.net/kem.846.169
摘要
This study aims to equip orthodontic bracket SS 17-4 PH fabricated using metal injection molding with antibacterial properties. This can be achieved by applying TiO 2 coating on the surface of brackets using magnetron sputtering PVD method. This method is chosen due to its compatibility to be used on bulk metal and its ability to control thin-film stoichiometry. Samples were prepared using the series of following steps which comprised of metal injection molding, binder elimination with solvent and thermal debinding, sintering in vacuum and argon atmosphere, electropolishing, and magnetron sputtering PVD coatings as the final stage. Negative bias, sputtering power, and partial pressure on vacuum chamber were set as the constant parameters. The atmosphere inside the PVD chamber was controlled using oxygen and argon gases. XRD and SEM observations were carried out to obtain the information on the phase and morphology of the films. Rutile and anatase crystalline structures with 2,27 nm and 9,78 nm crystal size were measured in as-deposited PVD TiO 2 respectively. The deposition films were achieved in the range of 3 μm-8 μm.
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