Cluster Ion Beams and Sputtering

The introduction of commercial cluster ion sources has revolutionized secondary ion mass spectrometry, paving the way for a multitude of new applications, especially in the fields of bio and soft matter characterization. This chapter looks at the advantages of cluster ions for surface characterization, which demonstrate that the sputter and ion yields induced by clusters are much improved with respect to single atoms, often in a non-linear fashion. The current cluster ion source technologies are first presented, followed by consideration of the physical and chemical effects of kiloelectronvolt cluster ions impinging on solid surfaces. Finally, the pros and cons of different cluster ion sources regarding several applications in chemical and molecular surface characterization of materials are discussed.