纳米球光刻
材料科学
发光二极管
平版印刷术
光电子学
镜头(地质)
光子学
光子晶体
平面的
二极管
电子束光刻
扫描电子显微镜
光学
光功率
光散射
绿灯
散射
抵抗
激光器
纳米技术
制作
物理
图层(电子)
复合材料
病理
蓝光
计算机图形学(图像)
替代医学
计算机科学
医学
作者
Yonghui Zhang,Tongbo Wei,Zhuo Xiong,Liang Shang,Yingdong Tian,Yun Zhao,Pengyu Zhou,Junxi Wang,Jinmin Li
摘要
The light-emitting diodes (LEDs) with single, twin, triple, and quadruple photonic crystals (PCs) on p-GaN are fabricated by multiple-exposure nanosphere-lens lithography (MENLL) process utilizing the focusing behavior of polystyrene spheres. Such a technique is easy and economical for use in fabricating compound nano-patterns. The optimized tilted angle is decided to be 26.6° through mathematic calculation to try to avoid the overlay of patterns. The results of scanning electron microscopy and simulations reveal that the pattern produced by MENLL is a combination of multiple ovals. Compared to planar-LED, the light output power of LEDs with single, twin, triple, and quadruple PCs is increased by 14.78%, 36.03%, 53.68%, and 44.85% under a drive current 350 mA, respectively. Furthermore, all PC-structures result in no degradation of the electrical properties. The stimulated results indicate that the highest light extraction efficiency of LED with the clover-shape triple PC is due to the largest scattering effect on propagation of light from GaN into air.
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