热稳定性
材料科学
热重分析
等温过程
波动性(金融)
热分解
化学气相沉积
钡
金属有机气相外延
热重分析
傅里叶变换红外光谱
挥发
化学工程
物理化学
分析化学(期刊)
有机化学
纳米技术
化学
热力学
外延
金融经济学
图层(电子)
冶金
酶
物理
经济
工程类
作者
Teng Zhang,Hongwei Gu,Fazhu Ding,Fei Qu,Shaotao Dai
出处
期刊:Rare Metals
[Springer Science+Business Media]
日期:2012-12-01
卷期号:31 (6): 566-572
标识
DOI:10.1007/s12598-012-0559-7
摘要
The metal-organic chemical vapor deposition (MOCVD) technique is a promising process for high-temperature superconductor YBa2Cu3O7−δ(YBCO) preparation. In this technique, it is a challenge to obtain barium precursors with high volatility. In addition, the purity, evaporation characteristics and thermostability of adopted precursors in the whole process would decide the quality and reproducible results of YBCO film. In the present report, the barium precursor containing 2,2,6,6-tetramethylheptane-3,5-dionate and tetraethylenepentamine ligands (Ba(TMHD)-tetraen) was synthesized and identified by FTIR, 1H NMR, 13C NMR and ESI-MS spectroscopy. Subsequently the thermal property and the kinetics of decomposition were systematically investigated by combining non-isothermal thermogravimetric analysis methods (TGA), Ozawa, Kissinger and Friedman methods. On the basis of the apparent activation energy of the evaporation process, the thermostability and evaporation characteristics of the precursors were discussed. All results show that Ba(TMHD)-tetraen has higher volatility than Ba(TMHD)2, but it is unstable and highly sensitive to the change of temperature during the whole evaporation process. Therefore, it is very important to choose suitable volatilization technology and conditions for avoiding Ba(TMHD)-tetraen breakdown (or thermal aging) during the MOCVD process.
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